Printed circuit board and corresponding method for producing a printed circuit board

ABSTRACT

The printed circuit board with at least one substrate layer having signal lines on a corresponding upper surface and on a corresponding lower surface has a sleeve-sized conductive layer on a circumference of at least one via hole between the upper and lower surface for a conductive connection between at least one signal line on the upper surface and at least one signal line on the lower surface. to An axial enlargement of the sleeve-sized conductive layer is radially bent above a base layer of copper on the upper surface and below a base layer of copper on the lower surface.

FIELD OF THE INVENTION

The invention relates to a printed circuit board and a correspondingmethod for producing a printed circuit board.

BACKGROUND OF THE INVENTION

Nowadays in very-large-scale-integrated-circuits (VLSIC) a continuouslyincreased amount of technical functions is realized on a continuouslydecreased size. For housing such a highly integrated circuit theBall-Grid-Array-(BGA)-Technology has been developed. In BGA technologythe pins are arranged comparatively compact as solder balls in a grid ofcolumns and rows on the lower surface of the housing for aSurface-Mounted-Device (SMD) assembling. In a reflow solder process in asoldering furnace the solder balls are fused and are combined withcontact pads on a Printed-Circuit-Board (PCB).

With increasing integration in the VLSI circuits the diameter of thecontact balls has decreased from 600 Micrometer a few years ago to 200Micrometer nowadays, whereas the distance between the contact balls inthe grid simultaneously has diminished from 1000 Micrometers a few yearsago to 500 Micrometer today and will reach 400 Micrometer in nearestfuture. Consequently, the width of a signal line between two contactballs decreases from 75 Micrometer a few years ago to 50 Micrometertoday and the space distance between a signal line and a contact paddecreases from 100 Micrometer a few years ago to 50 Micrometer today.Future ambition yields to lead at least two signal lines between twocontact pads will result in a fewer amount of substrate layers in theprinted circuit board.

A further reduction of the width for the signal line and for the spacedistance between a signal line and a contact pad is difficult toachieve, because the current running over the signal line requires aspecific minimum signal line width and a specific space distance to thenext contact ball for radio frequency reason.

Typically, for connecting a pin of the VLSI circuit with multipleelectronic components on the printed circuit board via a correspondingsignal line a via hole is realized connecting the contact pad on theupper surface with another contact pad on the lower surface of thesubstrate layer in case of a single-layered PCB or with contact pads onan upper and/or a lower surface of each substrate layer in case of amulti-layered PCB.

US 2014/0123489 A1 shows a via hole with a through connection betweensignal lines on the surfaces on substrate layers in a multi-layered PCB.

The connection between each contact pad in the via-hole is realized bycoating the circumference of the via-hole with a sleeve-sized conductivelayer. The coating thickness of this sleeve-sized conductive layer isoptimized to approximately 25 Micrometer nowadays enabling both asufficient current leading characteristic and a minimized diameter forthe via-hole and consequently for the contact pad.

Thermal stress during reflow soldering at approximately 250° Celsiusleads to a gas emission of residual moisture in the substrate layer ofthe printed circuit board. This disadvantageously results in a burst ofthe conductive layer preferably at the corner between the sleeve-sizedconductive layer on the circumference of the via-hole and the conductivelayer on the upper or lower surface of the printed circuit board if thesleeve-sized conductive layer of the via-hole has a coating thickness ofapproximately 25 Micrometer.

One object of the invention among others is to provide a printed circuitboard with at least one substrate layer containing at least one via holewhich overcomes the disadvantageous burst of the conductive layer at thecorner between the via hole and the upper resp. lower surface and toprovide a corresponding production method for such a printed circuitboard.

SUMMARY OF THE INVENTION

According to a first aspect of the invention, an axial enlargement ofthe sleeve-sized conductive layer on the circumference of each via holeis bent radially above a metallic base layer preferably of copper on theupper surface and below a metallic base layer preferably of copper onthe lower surface of the inventive printed circuit board.

Thus the thickness of the conductive layer at the corner between theconductive layer on the upper resp. the lower surface of the printedcircuit board and the sleeve-sized conductive layer in the via hole isenlarged resulting in a better mechanical resistance against thermalburst caused by occurring gas emission of heated residual moisture inthe substrate layer.

Preferably, for realizing a sufficient mechanical resistance againstthermal burst the height between the top of the radially bentenlargement of the sleeve-sized conductive layer and the top of the baselayer of copper is at least 5 Micrometer, preferably at least 10Micrometer and most preferred at least 15 Micrometer.

By preference, each via hole inside the sleeve-sized conductive layer isfilled with a dielectric material, especially resin such as an epoxyresin. The filling of the via hole inside the sleeve-sized conductivelayer with the epoxy resin advantageously prevents a defective etchingof the sleeve-sized conductive layer inside the via hole. Additionally,the epoxy resin in the via hole advantageously avoids a leakage ofsolder in the via hole during soldering process changing erroneously thethickness of the sleeve-sized conductive layer.

For realizing both a minimized diameter of the contact pad andconsequently of the corresponding via hole and a sufficient electricalconnection between the upper and lower contact pad of the correspondingvia hole the thickness of sleeve-sized conductive layer isadvantageously smaller than 32 Micrometer, preferably equal to 30Micrometer.

Preferably, the sleeve-sized conductive layer in the via hole comprisesan outer chemical-vapor-deposited sleeve-sized metal layer preferably ofcopper and an inner galvanically deposited sleeve-sized metallic layerpreferably of copper.

The outer chemical-vapor-deposited sleeve-sized layer of copperadvantageously has a thickness between 4 and 6 Micrometer, preferablyessentially equal to 5 Micrometer, whereas the inner galvanicallydeposited sleeve-sized layer of copper has a thickness of smaller than26 Micrometer, preferably equal to 25 Micrometer.

Preferably the outer chemical-vapor-deposited sleeve-sized layerpreferably of copper which is firstly deposited in the via hole has asignificantly smaller thickness in comparison to the inner galvanicallydeposited sleeve-sized layer of copper, because the outer sleeve-sizedlayer of copper only serves as essential electrode for the galvanicallydeposition of the inner sleeve-sized layer of copper inside the viahole.

In a first preferred embodiment of the invention the dielectricmaterial, which is preferably an epoxy resin, is filled between the topand the bottom of the axially enlarged and radially bent sleeve-sizedconductive layer inside the via hole. Thus the contact pad above andbelow the via hole in the first embodiment of the inventive printedcircuit board contains an annular conductive area with a non-conductivecircular area inside.

In a second preferred embodiment of the invention the dielectricmaterial, which is preferably an epoxy resin, is filled between the topand bottom of the chemical-vapor-deposited layer preferably of copper inthe axially enlarged and radially bent sleeve-sized conductive layerinside the via hole. Additionally, in the second embodiment of theinventive printed circuit board between the top of the galvanicallydeposited layer preferably of copper and the topchemical-vapor-deposited layer preferably of copper and between thebottom of the galvanically deposited layer preferably of copper and thebottom of the chemical-vapor-deposited layer preferably of copper aconductive layer preferably of copper is galvanically deposited. Thusthe contact pad above and below the via hole in the second embodiment ofthe inventive printed circuit board contains a circular conductive area.

In a first preferred variant of the invention the thickness of the baselayer preferably of copper between the radially bent enlargement of thesleeve-sized conductive layer and the substrate layer equals to thethickness of the neighboring base layer preferably of copper.

In a second preferred variant of the invention the thickness of themetallic base layer preferably of copper between the radially bentenlargement of the sleeve-sized conductive layer and the substrate layeris larger compared to the thickness of the neighboring base layerpreferably of copper. Thus an additional enlargement of the conductivelayer at the corner between the conductive layer on the upper surfaceand the lower surface of the printed circuit board, respectively, andthe sleeve-sized conductive layer in the via hole can be realizedminimizing advantageously the risk of a burst.

After boring the via holes through the inventive printed circuit board,depositing a conductive layer on the upper and lower surface of theinventive printed circuit board and depositing a sleeve-sized conductivelayer on the circumference of each via hole a first sublayer of theconductive layer on the upper and lower surface of the printed circuitboard is preferably removed in all ranges which are positioned at leasta specific minimum distance from each of the via holes. Hereby, thisspecific minimum distance from each of the via holes corresponds to thediameter of the contact pads above and below the via hole.

Thus the thickness of the conductive layer at the corner between theconductive layer on the upper and the lower to surface of the printedcircuit board , respectively, and the sleeve-sized conductive layer inthe via hole is enlarged resulting in a better mechanical resistanceagainst thermal burst caused by occurring gas emission of heatedresidual moisture in the substrate layer.

The first sublayer of the conductive layer removed by etching in allranges, which are positioned at least a specific minimum distance fromeach of the via holes, preferably comprises in a first variant of theinvention the galvanically deposited metallic layer preferably of copperand the chemical-vapor-deposited metallic layer preferably of copper ofthe conductive layer.

In a second preferred variant of the invention the first sublayer of theconductive layer removed by etching in all ranges, which are positionedat least a specific minimum distance from each of the via holes,comprises the galvanically deposited metallic layer preferably ofcopper, the chemical-vapor-deposited layer preferably of copper and asecond sublayer of the metallic base layer preferably of copper of theconductive layer on the upper and lower surface of the inventive printedcircuit board.

By preference, before removing the first sublayer of the conductivelayer each via hole inside the corresponding sleeve-sized conductivelayer is filled with a dielectric material, preferably an epoxy resin. Aphoto-resistant layer is deposited on ranges above the conductive layeron the upper and lower surface of the printed circuit board inside thespecific minimum distance from each of the at least one via hole.

Preferably, the etching of the first sublayer of the conductive layer onthe upper and lower surface of the printed circuit board is performed bya light beam of a laser which can be positioned on the upper and lowersurface of the printed circuit board. Thus an exact positioning of thelaser beam and consequently a very precise etching can be advantageouslyrealized minimizing the appearance of undercut.

In a first preferred embodiment of the invention the dielectric materialis filled between the top and the bottom of the galvanically depositedmetallic layer preferably of copper resulting in contact pads above andbelow the via holes containing an annular conductive area with anon-conductive circular area inside.

In a second preferred embodiment of the invention the dielectricmaterial is removed from each via hole until the top of thechemical-vapor-deposited metallic layer preferably of copper. The holeis then refilled with a galvanically deposited metallic layer preferablyof copper resulting in contact pads above and below the via holescontaining a circular conductive area.

Instead of copper other metals such as for example aluminium, titan orindium can be used.

BRIEF DESCRIPTION OF THE DRAWING

In the following, the invention is described on the basis of thedrawings which present an advantageous exemplary embodiment of theinvention by way of example only. In the drawings:

FIG. 1A to 1L show the succeeding producing steps of a first embodimentof the inventive printed circuit board and

FIG. 2A to 2O show the succeeding producing steps of a second embodimentof the inventive printed circuit board.

DETAILED DESCRIPTION OF THE DRAWINGS

In the following, the inventive method for producing a first embodimentof the inventive printed circuit board is explained with reference toFIG. 1A to 1L.

The explained embodiment of the inventive printed circuit board isfabricated on the basis of the so called “subtractive technology” usinga piece of substrate layer 1 which is laminated on its upper and lowersurface with a base layer of copper 2 according to FIG. 1A. The“subtractive technology” is especially used in small and medium sizedproduction series of printed circuit boards containing via holes withthrough connection. However, the present invention is not limited tothis technology.

The substrate layer 1 is often made of the dielectric materialpolytetrafluorethylene (PTFE). Preferably, for radio frequencyapplications the dielectric material MEGTRON 6 (abbreviated: MEG 6) isused which combines a low dielectric constant, a low dielectricdissipation factor, a low transmission loss and a high heat resistance.The thickness of the substrate layer 1 is appropriately chosen forfulfilling the radio frequency requirements of the application.

The thickness of the base layer of copper 2 on the upper and lowersurface of the substrate layer 1 is preferably smaller than 18Micrometer, most preferably equal to 12 Micrometer.

In the first producing step at least one via hole 3 is bored on thelocation of a contact pad being in contact with the corresponding solderball of an integrated circuit in BGA technology. The diameter of eachvia hole 3 is preferably smaller than the diameter of the correspondingcontact pad above or below the via hole which may be equal to 200Micrometer for example. This precision requirement can be realized byconventional mechanical or laser based bore technology. This is shown inFIG. 1B.

In the next producing step an additional layer of copper 4 is depositedby means of a chemical vapor deposition (CVD) process on the base layerof copper 2 on the upper and lower surface of the substrate layer 1 andon the circumference of each via hole 3 according to FIG. 1C. Anyconventional CVD process for printed circuit boards according to priorart can be used.

The preferred thickness of the chemical vapor deposited layer 4 on eachsurface of the substrate layer 2, i.e. on the upper and lower surface ofthe substrate layer 1 and on the circumference of each via hole 3, isbetween 4 and 6 Micrometer, preferably equal to 5 Micrometer.

The chemical vapor deposited layer 4 represents the electrode for thegalvanically deposition of a further layer of copper on the innersurface of the substrate io layer 1 in each via hole 3. Thisgalvanically deposited layer of copper 5 is coated additionally to theinner surface in each via hole 3 on the chemical deposited layer ofcopper 2 on the upper and lower surface of the substrate layer 5according to FIG. 1D. Any common known galvanically deposition processfor printed circuit boards according to prior art can be used. Thusinside each via hole 3 a sleeve-sized conductive layer with an innergalvanically deposited layer of copper 5 and an outer chemical depositedlayer of copper 4 connecting the conductive layers on the upper andlower surface of the substrate layer 1 is realized on the circumferenceof each via hole 3.

The thickness of the galvanically deposited layer 4 on each surface ofthe substrate layer 2, i.e. on the upper and lower surface of thesubstrate layer 1 and on the circumference of each via hole 3,preferably is between 20 and 30 Micrometer, preferably equal to 25Micrometer.

In the next producing step each via hole 3 is filled with a dielectricmaterial 6, preferably with an epoxy resin such as a flame retardent(FR4) material, according to FIG. 1E. Dielectric material deposited onthe upper and/or lower surface of the galvanically deposited layer ofcopper 5 is removed by mechanical brushing. Consequently, the dielectricmaterial 6 is only disposed inside the galvanically coated sleeve-sizedlayer of copper 5.

In the next producing step the total upper surface and the total lowersurface of the printed circuit board to be fabricated is coated with aphotoresist layer 7 for example by means of spraying a liquidphotosensitive resistant material on the total upper surface and on theio total lower surface of the printed circuit board to be fabricated.This is shown in FIG. 1E. Alternatively, the photoresist layers aredisposed on the total upper surface and on the total lower surface ofthe printed circuit board to be fabricated by dipping the printedcircuit board to be fabricated in a bath filled with liquidphotosensitive resistant material. The thickness of the photoresistlayer 7 has to be equal or smaller than its smallest horizontal extent,i.e. the diameter of the contact pads realized above and below of eachvia hole 3. Consequently, the thickness of the photoresist layer 7 hasto be smaller than 200 Micrometer, preferably in the range between 20and 50 Micrometer.

In the next producing step the photoresist layer 7 has to be removed inranges of the upper and lower surface of the inventive printed circuitboard which are located at least a specific minimum distance apart fromeach via hole 3 according to FIG. 1G. This specific minimum distancerepresents the diameter of the contact pads above and/or below each viahole 3.

In the ranges on the upper and lower surface of the inventive printedcircuit board, which are not protected by a photoresist layer 7, asublayer of the conductive layer, called first sublayer in thefollowing, is removed by etching according to FIG. 1H. Thus all rangeswhich are located outside of each contact pad above and below thecorresponding via holes 3 are freed from the first sublayer.Iron-III-chloride (Fe3Cl) or ammonium persulfate ((NH₄)₂S₂O₈) areexamples to be used as etching agent.

In a first preferred variant of the invention the etched first sublayerof the conductive layer on the upper and the lower surface of theinventive printed circuit board comprises the galvanically depositedlayer of copper 5 and the chemical deposited layer of copper 4.

As shown in FIG. 1H, in a second preferred variant of the invention theetched first sublayer of the conductive layer on the upper and lowersurface of the inventive printed circuit board comprises thegalvanically deposited layer of copper 5, the chemical deposited layerof copper 4 and a sublayer of the base layer of copper 2, called secondsublayer in the following.

In FIG. 1I the remaining photoresist layers 7 located on the contactpads 8 and 8′ above and below of each via hole 3 are removed by anappropriate solvent, i.e. exemplarily acetone, which is called“stripping”.

As can be seen in FIG. 1I the sleeve-sized conductive layer comprisingthe galvanically deposited inner sleeve-sized layer of copper 5 and thechemical deposited outer sleeve-sized layer of copper 4 inside the viahole 3 is axially enlarged and radially bent above the base layer ofcopper 2 on the upper and lower surface of the substrate layer 1. Thisresults in an increased thickness of the conductive layer at the cornerbetween the conductive layer on the upper and the lower surface of theprinted circuit board, respectively, and the sleeve-sized conductivelayer in the via hole in comparison to a conductive layer at that cornerwith only a base layer of copper 2 on the upper and lower surface of thesubstrate layer 1 and a sleeve-sized galvanically deposited inner layerof copper 5 and a sleeved-sized chemical deposited outer layer of copper4 inside the via hole 3.

In a next producing step the total upper surface and the total lowersurface of the printed circuit board to be fabricated is coated a secondtime with a photoresist layer 7′ according to FIG. 1J. This time thethickness of photoresist layer 7′ preferably corresponds to the smallestpossible realized width of a signal line on the inventive printedcircuit board. Thus the thickness of the photoresist layer 7′ has to beequal or smaller than 50 Micrometer, preferably in the range of 15Micrometer.

In the next producing step the photoresist layer 7′ has to be removed by“stripping” in ranges of the upper and lower surface of the inventiveprinted circuit board where signal lines or additional contact pads arelocated as can be seen in FIG. 1K.

After etching the base layer of copper 2 in regions on the upper andlower surface of the inventive printed circuit board by an appropriateetching agent, which are not protected by a photoresist layer 7′, andafter removing the remaining photoresist layer 7′ by means of a solventthe first embodiment of the inventive printed circuit board with a viahole 3, contact pads 8 and 8′ above and below that via hole 3, whichhave each an annular conductive layer and a circular non-conductivelayer inside that conductive layer, and several signal lines oradditional contact pads 9 ₁, 9 ₁′, 9 ₂, 9 ₂′, 9 ₃, 9 ₃′, 9 ₄, 9 ₄′, 9 ₅,9 ₅′, 9 ₆, 9 ₆′, 9 ₇, 9 ₇′, 9 ₈ and 9 ₈′ is realized according to FIG.1L.

In the following, the second embodiment of the inventive printed circuitboard is explained with reference to FIG. 2A to 2O. The producing stepsin FIG. 2A to 2J of the second embodiment correspond to the producingsteps in FIG. 1A to 1J of the first embodiment and are thus notrepetitively explained.

In the producing step shown in FIG. 2K the photoresist layer 7′ isremoved by “stripping” using an appropriate etching agent in regionsabove or below the filling of the via hole 3 with dielectric material 6on the upper and lower surface of the inventive printed circuit board,respectively.

The dielectric material 6 in the via hole 3 is removed down to the topof the chemical vapor deposited layer of copper 4 on the upper and lowersurface of the inventive printed circuit board using an appropriateetching agent according to FIG. 2L.

In the next producing step the regions in the via hole 3 which areremoved from dielectric material 6 in the former producing stepaccording to FIG. 2L are refilled with a galvanically deposited layer ofcopper 5.

The producing steps shown in FIG. 2N and 2O of the second embodiment ofthe inventive printed circuit board correspond to the producing stepsshown in FIG. 1K and 1L of the first embodiment of the inventive printedcircuit board and are thus not repetitively explained.

As shown in FIG. 2O the second embodiment of the inventive printedcircuit board with a via hole 3, contact pads 8″ and 8′″ above and belowthat via hole 3, which have each a circular conductive layer, andseveral signal lines or additional contact pads 9 ₁, 9 ₁′, 9 ₂, 9 ₂′, 9₃, 9 ₃′,9 ₄, 9 ₄′,9 ₅, 9 ₅′,9 ₆, 9 ₆′,9 ₇, 9 ₇′,9 ₈ and 9 ₈′ isrealized.

The two described embodiments of the inventive printed circuit boardrepresent a single layer printed circuit board with one substrate layer1. Printed circuit boards having multiple substrate layers with signallines and/or contact pads on the corresponding above, intermittent andlower surfaces are also within the scope of the invention.

The invention is not restricted to the exemplary embodiments presented.For example, other metals such as aluminium, titan or indium can be usedinstead of copper. Advantageously, all of the features described aboveor features shown in the drawings can be combined with one anotherarbitrarily within the scope of the invention.

While various embodiments of the present invention have been describedabove, it should be understood that they have been presented by way ofexample only, and not limitation. Numerous changes to the disclosedembodiments can be made in accordance with the disclosure herein withoutdeparting from the spirit or scope of the invention. Thus, the breadthand scope of the present invention should not be limited by any of theabove described embodiments. Rather, the scope of the invention shouldbe defined in accordance with the following claims and theirequivalents.

Although the invention has been illustrated and described with respectto one or more implementations, equivalent alterations and modificationswill occur to others skilled in the art upon the reading andunderstanding of this specification and the annexed drawings. Inaddition, while a particular feature of the invention may have been todisclosed with respect to only one of several implementations, suchfeature may be combined with one or more other features of the otherimplementations as may be desired and advantageous for any given orparticular application.

What is claimed is:
 1. A printed circuit board with at least onesubstrate layer having signal lines on a corresponding upper surface andon a corresponding lower surface, wherein on a circumference of at leastone via hole a sleeve-sized conductive layer is disposed between theupper and lower surface for a conductive connection between at least onesignal line on the upper surface and at least one signal line on thelower surface and wherein an axial enlargement of the sleeve-sizedconductive layer is radially bent above a metallic base layer on theupper surface and below a metallic base layer on the lower surface. 2.The printed circuit board according to claim 1, wherein the heightbetween the top of the radially bent enlargement of the sleeve-sizedconductive layer and the top of the base layer of copper is at least 5Micrometer, preferably at least 10 Micrometer and most preferred atleast 15 Micrometer.
 3. The printed circuit board according to claim 1,wherein each via hole inside the sleeve-sized conductive layer is filledwith a dielectric material.
 4. The printed circuit board according toclaim 3, wherein the dielectric material is a resin, preferably an epoxyresin.
 5. The printed circuit board according to claim 1, wherein thesleeve-sized conductive layer comprises an outerchemical-vapor-deposited layer, preferably of copper, and an innergalvanically deposited layer, preferably of copper.
 6. The printedcircuit board according to claim 3, wherein the dielectric material isfilled between the top and the bottom of the axially enlarged andradially bent sleeve-sized conductive layer inside the via hole.
 7. Theprinted circuit board according to claim 5, wherein the dielectricmaterial is filled between the top and the bottom of thechemical-vapor-deposited layer in the axially enlarged and radially bentsleeve-sized conductive layer inside the via hole.
 8. The printedcircuit board according to claim 7, wherein between the top of thegalvanically deposited layer and the top of the chemical-vapor-depositedlayer and between the bottom of the galvanically deposited layer and thebottom of the chemical-vapor-deposited layer a conductive layerpreferably of copper, is galvanically deposited.
 9. The printed circuitboard according to claim 1, wherein a thickness of the base layerbetween the radially bent enlargement of the sleeve-sized conductivelayer and the substrate layer is larger than a thickness of theneighboring base layer on the upper and lower surface.
 10. A method forproducing a printed circuit board with at least one substrate layerhaving a signal line on a corresponding upper surface and on acorresponding lower surface comprising following method steps: boring atleast one via hole through the printed circuit board, depositing aconductive layer on the upper and lower surface and a sleeve-sizedconductive layer on a circumference of each of the at least one via holebetween the upper and lower surface and removing a first sublayer of theconductive layer on the upper and lower surface in all ranges which arepositioned at least a specific minimum distance from each of the atleast one via hole.
 11. The method for producing a printed circuit boardaccording to claim 10, wherein the depositing of the conductive layer onthe upper and lower surface comprises a depositing of a metallic baselayer preferably of copper, a chemical-vapor-depositing of a metalliclayer preferably of copper and a galvanically depositing of a metalliclayer preferably of copper.
 12. The method according to claim 10,wherein the depositing of the sleeve-sized conductive layer on thecircumference of each of the at least via hole comprises achemical-vapor-depositing of a metallic layer preferably of copper and agalvanically depositing of a metallic layer preferably of copper. 13.The method according claim 10, wherein before removing the firstsublayer of the conductive layer each via hole inside the correspondingsleeve-sized conductive layer is filled with a dielectric material. 14.The method according to claim 13, wherein before removing the firstsublayer of the conductive layer and after filling each via hole with adielectric material a photo-resistant layer is deposited on ranges abovethe conductive layer on the upper and lower surface inside the specificminimum distance from each of the at least one via hole.
 15. The methodaccording to claim 14, wherein after depositing the photo-resistantlayer the first sublayer of the conductive layer is etched on the upperand lower surface using a light beam of a laser which is positioned onthe upper and lower surface.
 16. The method according to claim 15,wherein the etched first sublayer comprises the chemical-vapor-depositedlayer preferably of copper and the galvanically deposited layerpreferably of copper.
 17. The method according to claim 15, wherein theetched first sublayer comprises a chemical-vapor-deposited layerpreferably of copper, a galvanically deposited layer preferably ofcopper and a second sublayer of the base layer preferably of copper. 18.The method according to claim 13, wherein the dielectric material isremoved from each of the at least one via hole down to the top of achemical-vapor-deposited layer preferably of copper and is refilled witha galvanically deposited layer preferably of copper